Ultrahigh-quality photonic crystal cavity in GaAs |
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| Authors: | Herrmann Rafael Sünner Thomas Hein Tobias Löffler Andreas Kamp Martin Forchel Alfred |
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| Affiliation: | Lehrstuhl für Technische Physik, Universit?t Würzburg, Würzburg, Germany. |
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| Abstract: | Membrane-based photonic crystal GaAs cavities with a double-heterostructure design were investigated. They show the highest quality factors for GaAs photonic crystal cavities to date, exhibiting quality factors higher than 10(5). The resonances of these cavities were fine-tuned in steps smaller than 2 nm by digital etching. |
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