Thickness measurement of thin dielectrics with electron spectroscopy

Summary Future generations of electronic components need new methods for thickness measurement. This paper demonstrates that electron spectroscopy is exact enough to measure thicknesses up to 15 nm with an accuracy better than 5%. The model of a constant mean free path of the electrons only varying with the material has to be modified. One has to observe the complete set of all parameters for such thickness measurements.

---

Schichtdicken-Messung dünner Dielektrica mit Hilfe der Electronenspektroskopie