InAs/GaSb superlattice focal plane arrays for high-resolution thermal imaging |
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Authors: | R Rehm M Walther J Schmitz J Fleißner F Fuchs J Ziegler W Cabanski |
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Institution: | 1. Fraunhofer-Institut für Angewandte Festk?rperphysik (IAF), Tullastrasse 72, D-79108, Freiburg, Germany 2. AIM Infrarot-Module GmbH, Theresienstrasse 2, D-74072, Heilbronn, Germany
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Abstract: | The first fully operational mid-IR (3–5 μm) 256×256 IR-FPA camera system based on a type-II InAs/GaSb short-period superlattice
showing an excellent noise equivalent temperature difference below 10 mK and a very uniform performance has been realized.
We report on the development and fabrication of the detecor chip, i.e., epitaxy, processing technology and electro-optical
characterization of fully integrated InAs/GaSb superlattice focal plane arrays. While the superlattice design employed for
the first demonstrator camera yielded a quantum efficiency around 30%, a superlattice structure grown with a thicker active
layer and an optimized V/III BEP ratio during growth of the InAs layers exhibits a significant increase in quantum efficiency.
Quantitative responsivity measurements reveal a quantum efficiency of about 60% for InAs/GaSb superlattice focal plane arrays
after implementing this design improvement.
The paper presented there appears in Infrared Photoelectronics, edited by Antoni Rogalski, Eustace L. Dereniak, Fiodor F. Sizov, Proc. SPIE Vol. 5957, 595707 (2005). |
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Keywords: | infrared focal plane array superlattice GaSb thermal imaging |
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