Use of amorphous silicon films as sensors |
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| Affiliation: | 1. Key Laboratory for Liquid-Solid Evolution and Processing of Materials (Ministry of Education), School of Materials Science and Engineering, Shandong University, Jinan 250061, China;2. School of Materials Science and Engineering, Ocean University of China, Qingdao 266100, China |
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| Abstract: | Transport phenomena in an amorphous silicon film deposited by a glow discharge technique have been reviewed, and many interesting applications of this material in sensors are considered. A large Seebeck effect is observed in the highly-conductive amorphous silicon film and a thermopile power sensor has been developed using this film. The large elastoresistance effect observed in the film has been investigated for possible use in strain sensors, touch sensors and real-time correlators. The light-related phenomena and their sensor applications have also been briefly reviewed. |
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