Surface segregation of Ge at SiGe(001) by concerted exchange pathways |
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Authors: | Bogusławski P Bernholc J |
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Institution: | Instytut Fizyki PAN, 02-668 Warsaw, Poland. |
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Abstract: | The segregation of Ge during growth on SiGe(001) surfaces was investigated by ab initio calculations. Four processes involving adatoms rather than ad-dimers were considered. The two most efficient channels proceed by the concerted exchange mechanism and involve a swap between an incorporated Ge and a Si adatom, or between Si and Ge in the first and the second surface layers, respectively. The calculated activation energies of approximately 1.5 eV explain well the high-temperature experimental data. Segregation mechanisms involving step edges are much less efficient. |
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