| Abstract: | This article is concerned with the mathematical analysis of models for Micro-Electro-Mechanical Systems (MEMS). These models arise in the form of coupled partial differential equations with a moving boundary. Although MEMS devices are often operated in non-isothermal environments, temperature is often neglected in the mathematical investigations. In light of this finding the focus of our modelling is to incorporate temperature and the related material properties. We derive a full model for this coupling and discuss a simplified version as well. Lastly, we prove local well-posedness in time and also global well-posedness under additional assumptions on the model’s parameters. |
