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Parametric analysis of the inductively coupled plasma
Authors:I. Holclajtner-Antunović  Z. Raspopović  V. Georgijević  M. Tripković  J. Georgijević
Affiliation:(1) Faculty of Physical Chemistry, University of Belgarde, PO Box 137, Yu-11001 Belgarde, Yugoslavia;(2) Institute of Physics, Yu-11001 Belgrade, Yugoslavia;(3) Faculty of Civil Engineering, University of Belgrade, PO Box 895, Yu-11001 Belgrade, Yugoslavia;(4) Faculty of Technology and Metallurgy, University of Belgrade, PO Box 494, Yu-11001 Belgrade, Yugoslavia
Abstract:A systematic parametric study of an LTE (local thermodynamic equilibrium) mathematical model of pure inductively coupled argon plasma (ICAP) used for spectrochemical purposes was performed by means of computer simulations. The spatial distributions of temperature, gas velocity, magnetic field and energy losses were investigated under typical plasma operating conditions as function of the ICAP geometrical dimensions and dynamic parameters. These theoretical calculations can be used to predict the properties of the applied plasma in the course of practical work, to choose the optimal conditions by changing the operating parameters and to interpret existing analytical results.
Keywords:
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