NSERC (Natural Sciences and Engineering Research Council of Canada) industrial research chair on “Low pressure plasma processing of materials” |
| |
Authors: | M R Wertheimer L Martinu J E Klemberg-Sapieha |
| |
Institution: | (1) Department of Engineering Physics, Ecole Polytechnique Québec, Montreal, Canada |
| |
Abstract: | |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|