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| 引用本文： | 赵杰,唐德礼,程昌明,耿少飞.???????????????????????????о?[J].核聚变与等离子体物理,2009,29(1):92-96. |
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| 作者姓名： | 赵杰 唐德礼 程昌明 耿少飞 |
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| 作者单位： | (?????????????о??????? 610041) |
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| 摘 要： | 介绍了一种低功率圆柱形阳极层离子源的工作特性和束流分布特性。离子源正常工作参数范围为工作电压200～1200V,放电电流0.1～1.4A,工作气压1.9×10-2～1.7×10-1Pa,气体流量5～20sccm。离子源有两个工作状态：发散状态和准直性状态。
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| 关 键 词： | 圆柱形阳极层离子源 离子束 发散状态 准直性状态 |
| 收稿时间： | 2008-02-21 |
| 修稿时间： | 2008-09-20 |
Characteristics of the low power cylindrical anode layer ion source |
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| ZHAO Jie,TANG De-li,CHENG Chang-ming,GENG Shao-fei.Characteristics of the low power cylindrical anode layer ion source[J].Nuclear Fusion and Plasma Physics,2009,29(1):92-96. |
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| Authors: | ZHAO Jie TANG De-li CHENG Chang-ming GENG Shao-fei |
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| Institution: | (Southwestern Institute of Physics, Chengdu 610064) |
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| Abstract: | A low power cylindrical anode layer ion source and its working characteristic, and the beam distribution are introduced. This ion source has two working states, emanative state and collimated state, and the normal parameters of this system are: working voltage 200～1200V, discharge current 0.1～1.4A, air pressure 1.9×10-2～1.7×10-1Pa, gas flow 5～20sccm. |
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| Keywords: | Cylindrical Anode layer ion source Ion beam Emanative state Collimated state |
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