| 热处理对立方相结构Mg0.57Zn0.43O合金薄膜表面和组成的影响 |
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| 引用本文： | 曹建明,秦杰明,张振中,王立昆,郑剑,韩舜,赵延民,张炳烨,张吉英,申德振. 热处理对立方相结构Mg0.57Zn0.43O合金薄膜表面和组成的影响[J]. 发光学报, 2011, 32(10): 973-976 |
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| 作者姓名： | 曹建明 秦杰明 张振中 王立昆 郑剑 韩舜 赵延民 张炳烨 张吉英 申德振 |
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| 作者单位： | 1. 中国科学院 激发态物理重点实验室, 长春光学精密机械与物理研究所, 吉林 长春 130033;2. 长春理工大学 材料科学与工程学院, 吉林 长春 130011;3. 中国科学院 研究生院, 北京 100039 |
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| 基金项目： | Project supported by the National Basic Research Program of China(973 Program)(2011CB302006);the National Natural Science Foundation of China(10974197,60806002);the 100 Talents Program of the Chinese Academy of Sciences~~ |
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| 摘 要： | MgZnO合金具有可覆盖日盲紫外波段的禁带宽度和晶格匹配的单晶衬底,是理想的日盲紫外探测材料.由于MgO和ZnO分属立方相和六角相,分相问题使高质量单一相MgZnO难以获得.热处理是提高薄膜结晶质量的有效手段.利用MOCVD方法制备了单一立方相Mg0.57Zn0.43O合金薄膜,研究了薄膜的退火行为对薄膜结构和光学性能...
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| 关 键 词： | MgZnO合金 热退火 表面形貌 晶粒尺寸 |
| 收稿时间： | 2010-08-25 |
Annealing Effect on Smoothness and Composition of Cubic-phase Mg0.57Zn0.43O Thin Film |
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| CAO Jian-ming,QIN Jie-ming,ZHANG Zhen-zhong,WANG Li-kun,ZHENG Jian,HAN Shun,ZHAO Yan-min,ZHANG Bing-ye,ZHANG Ji-ying,SHEN De-zhen. Annealing Effect on Smoothness and Composition of Cubic-phase Mg0.57Zn0.43O Thin Film[J]. Chinese Journal of Luminescence, 2011, 32(10): 973-976 |
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| Authors: | CAO Jian-ming QIN Jie-ming ZHANG Zhen-zhong WANG Li-kun ZHENG Jian HAN Shun ZHAO Yan-min ZHANG Bing-ye ZHANG Ji-ying SHEN De-zhen |
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| Affiliation: | 1. Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;2. School of Materials Science and Engineering, Changchun University of Science and Technology, Changchun 130011, China;3. Graduate School of the Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | Annealing behavior for cubic-phase Mg0.57Zn0.43O thin films grown at 450 ℃ by metal-organic chemical vapor deposition were studied. After annealed at 550, 650, 750 and 850 ℃ in oxygen atmospheres, the crystal quality and surface smoothness of the thin films were improved significantly. Their bandgap shifts continuously to the higher energy the increasing annealing temperature. Confirmed by energy dispersive X-ray spectra, the enlarged bandgap was caused by the decrease of Zn content during annealing. Phase separation of the Mg0.57Zn0.43O films with significant surface roughening can also be observed during annealing at 950 ℃. |
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| Keywords: | MgZnO alloy thermal annealing surface morphology grain size |
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