首页 | 本学科首页   官方微博 | 高级检索  
     


Zum Wachstum von AIII-BV-Halbleitern aus nichtstöchiometrischen Schmelzen (I) Wachstum von GaAs auf GaAs bei konstanter Temperatur
Authors:H.-J. Tietze  R. Andrae  E. Butter
Abstract:A method for the preparation of GaAs layers of different thickness on GaAs from solutions of Ga at constant temperatures is described using inner cooling of the substrate holder by a gas flow. The dependence of the growth rate on the intensity of inner cooling, movement of the substrate holder, and on growth temperature is given and explained. Furtheron is shown that constitutional supercoolung can be avoided by means of a suitable temperature profile and absence of periodic temperature fluctuations.
Keywords:
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号