| 对称相位函数掩模化的研究 |
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| 引用本文： | 白临波,杜春雷,李展. 对称相位函数掩模化的研究[J]. 光子学报, 2000, 29(3): 255-259 |
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| 作者姓名： | 白临波 杜春雷 李展 |
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| 作者单位： | [1]中国科学院光电技术研究所,微细加工光学技术国家重点实验 [2]中国科学院光电技术研究所,微细加工光学技术国家重 |
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| 摘 要： | 本文对各种连续对称相位函数及其特性进行了分析,讨论了相位函数的2π调制、2N和N-1法量化等问题及数据处理过程,提出二元衍射元件CIF(Caltech Intermediate Form)格式掩模数据的生成方法,并建立了实用软件,为激光直写技术实现二元衍射光学元件制作提供了有效的手段.
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| 关 键 词： | 相位函数 掩模化 激光直写 CIF格式 |
| 收稿时间： | 1999-08-23 |
| 修稿时间： | 1999-08-23 |
MASKING OF SYMMETRICAL PHASE FUNCTION |
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| Bai Linbo,DuChunlei,Li Zhan. MASKING OF SYMMETRICAL PHASE FUNCTION[J]. Acta Photonica Sinica, 2000, 29(3): 255-259 |
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| Authors: | Bai Linbo DuChunlei Li Zhan |
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| Affiliation: | State key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209 |
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| Abstract: | In this paper a symmetrical phase function and its characteristic have been studied.The 2π modulation of phase function,the quantization using 2N and N-1 rule and the data processing were studied.The method of making mask data expressed with CIF format is given.A effective software was developed and which is a useful means for making BOE with direct laser writing. |
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| Keywords: | Phase function Masking Direct laser writing CIF format |
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