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多孔径扫描波面恢复技术的精度评定及影响因素
引用本文:程维明 林有略. 多孔径扫描波面恢复技术的精度评定及影响因素[J]. 光学学报, 1993, 13(8): 11-716
作者姓名:程维明 林有略
作者单位:上海科技大学,上海科技大学,上海科技大学 应用光学与检测实验室,上海201800,应用光学与检测实验室,上海201800,应用光学与检测实验室,上海201800
摘    要:多孔径扫描波面恢复技术是一项新的高精度大孔径面形检测手段.本文从建立波面恢复精度的评价标准出发,结合实测结果进行讨论,并对影响精度的两个重要因素即拼接模式及拼接区大小进行分析.

关 键 词:多孔径扫描 波面恢复 面形检测
收稿时间:1993-02-12

Factors Having influence on the accuracy of multi-aperture overlap-scanning technique (MAOST) and Analysis
CHENG Weiming LIN Youlue CHEN Mingyi. Factors Having influence on the accuracy of multi-aperture overlap-scanning technique (MAOST) and Analysis[J]. Acta Optica Sinica, 1993, 13(8): 11-716
Authors:CHENG Weiming LIN Youlue CHEN Mingyi
Abstract:Multi - aperture overlap - scanning technique (MAOST) is a effective meansof measuring large aperture wavefront of high precision. Having giventhe accuracy definition of MAOST, this paper discusses, withexperimental tests, two main influential factors, i. e. , the apertureconnection mode and overlap coefficient.
Keywords:multi- aperture overlap scanning   wavefront restroration   large optics test
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