| 石英晶体中的腐蚀隧道缺陷 |
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| 引用本文： | 李法荟,李建保,华大辰,王晓刚.石英晶体中的腐蚀隧道缺陷[J].人工晶体学报,2009,38(1):71-73. |
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| 作者姓名： | 李法荟 李建保 华大辰 王晓刚 |
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| 作者单位： | 清华大学材料科学与工程系,北京,100084;中材高新材料股份有限公司,北京,100102;清华大学材料科学与工程系,北京,100084;烁光特晶科技有限公司,北京,100018 |
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| 摘 要： | 石英晶体中的腐蚀隧道缺陷是晶体结构中位错的宏观表现.腐蚀隧道缺陷不仅影响石英加工过程,由于石英晶体元器件常处于冲击、振动、温度变化、辐射等的环境中,腐蚀隧道缺陷也大大影响元器件的性能,降低结构强度.本文对腐蚀隧道进行了比较系统的分析,提出了减少、抑制晶体中腐蚀隧道缺陷的技术手段.
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| 关 键 词： | 石英晶体 腐蚀隧道 位错 晶体生长 |
Study on the Etch-channel Defects in Crystal Quartz |
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| LI Fa-hui,LI Jian-bao,HUA Da-chen,WANG Xiao-gang.Study on the Etch-channel Defects in Crystal Quartz[J].Journal of Synthetic Crystals,2009,38(1):71-73. |
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| Authors: | LI Fa-hui LI Jian-bao HUA Da-chen WANG Xiao-gang |
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| Institution: | 1.Department of Materials Science and Engineering;Tsinghua University;Beijing 100084;China;2.Sinoma Advanced Materials Co.;Beijing 100102;3.Bright Crystals Technology Inc.;Beijing 100018;China |
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| Abstract: | Etch-channel is related to dislocation in crystal structure of synthetic quartz.Etch-channel affects fabrication procedure of quartz.At the same time,because quartz devices usually undertake physical impact,vibration,thermal impact,and radiation,etch-channel impairs their performance.In this paper,the mechanism of etch-channel is analyzed.Some technical measurements to restrict the formation of etch-channel are put forwarded. |
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| Keywords: | crystal quartz etch-channel dislocation crystal growth |
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