Calculation of the parameters of excimer light sources on the basis of a positive column glow discharge

We calculate the concentration of plasma and gas-temperature components in a contracted filament of a glow capillary discharge (R = 0.75 mm) in xenon for pressures of P = 100 and 400 Torr and currents of I = 6–15 mA for cases of with and without cryogenic cooling of the discharge. We find that the gas temperature in the channel of the glow discharge has a value of 1000–2000 K, the concentration of xenon excimers attains a maximum at the boundary of the filament with a value of 10¹⁰–10¹¹ cm⁻³, and the efficiency of electric energy transformation into excimer radiation energy has a value of 0.1–5%.