首页 | 本学科首页   官方微博 | 高级检索  
     检索      


Three-dimensional optical metrology with color-coded extended depth of focus
Authors:Hasman E  Keren S  Davidson N  Friesem A A
Abstract:A novel method of rapid three-dimensional optical metrology that is based on triangulation of a configuration of color-coded light stripes is presented. The method exploits polychromatic illumination and a combined diffractive-refractive element, so the incident light is focused upon a stripe that is axially dispersed, greatly increasing the depth-measuring range without any decrease in the axial or the lateral resolution. The discrimination of each color stripe is further improved by spectral coding and decoding techniques. An 18-fold increase in the depth of focus was experimentally obtained while diffraction-limited light stripes were completely maintained.
Keywords:
本文献已被 PubMed 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号