Laser-induced nano-patterning by means of interference subpatterns generated by microspheres |
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| Authors: | R. Denk K. Piglmayer D. Bäuerle |
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| Affiliation: | 1.Angewandte Physik, Johannes-Kepler-Universit?t, Altenbergerstrasse 69, A-4040, Linz, Austria,AT |
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| Abstract: | Interference patterns generated by a regular lattice of SiO2 microspheres on a transparent support are used for the surface patterning of polyimide (PI) foils. Using 248 nm excimer-laser radiation, thousands to millions of holes with a full width at half maximum (FWHM) of 160±40 nm can be generated with a single laser pulse. Received: 1 March 2002 / Accepted: 4 March 2002 / Published online: 10 September 2002 RID="*" ID="*"Corresponding author. Fax: +43-732/2468-9242, E-mail: dieter.baeuerle@jku.at |
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| Keywords: | PACS: 42.60.Eb 42.78.-b 81.60.-j |
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