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A radioreagent method for determination of traces of phosphorus in high-purity silicon
Authors:P. Y. Chen  J. S. Chen  H. J. Sun  M. H. Yang
Affiliation:(1) Institute of Nuclear Science, National Tsing Hua University, 300 Hsinchu, Taiwan Republic of China
Abstract:The present study explores the feasibility of the determination of phosphorus at the extreme trace levels in high-purity silicon by radioreagent method. After silicon dissolution with hydrofluoric and nitric acids and matrix volatilization, 12-molybdophosphoric acid (12-MPA) is formed by the addition of the radioreagent,99MoO42–, in nitric acid medium and then extracted into isobutyl acetate. By plotting the phosphorus content against the radioactivity of99Mo in the organic phase, a linear relationship persisting down to 5 ng is obtained. Special effort has been made to the elimination of the unreacted99MoO42– reagent and the optimal control of phosphorus blank introduced through the multistage analytical procedure in order to ensure reliable determination of phosphorus at the ppb level.
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