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A radioreagent method for determination of traces of phosphorus in high-purity silicon
Authors:P Y Chen  J S Chen  H J Sun  M H Yang
Institution:(1) Institute of Nuclear Science, National Tsing Hua University, 300 Hsinchu, Taiwan Republic of China
Abstract:The present study explores the feasibility of the determination of phosphorus at the extreme trace levels in high-purity silicon by radioreagent method. After silicon dissolution with hydrofluoric and nitric acids and matrix volatilization, 12-molybdophosphoric acid (12-MPA) is formed by the addition of the radioreagent,99MoO 4 2– , in nitric acid medium and then extracted into isobutyl acetate. By plotting the phosphorus content against the radioactivity of99Mo in the organic phase, a linear relationship persisting down to 5 ng is obtained. Special effort has been made to the elimination of the unreacted99MoO 4 2– reagent and the optimal control of phosphorus blank introduced through the multistage analytical procedure in order to ensure reliable determination of phosphorus at the ppb level.
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