A radioreagent method for determination of traces of phosphorus in high-purity silicon |
| |
Authors: | P Y Chen J S Chen H J Sun M H Yang |
| |
Institution: | (1) Institute of Nuclear Science, National Tsing Hua University, 300 Hsinchu, Taiwan Republic of China |
| |
Abstract: | The present study explores the feasibility of the determination of phosphorus at the extreme trace levels in high-purity silicon by radioreagent method. After silicon dissolution with hydrofluoric and nitric acids and matrix volatilization, 12-molybdophosphoric acid (12-MPA) is formed by the addition of the radioreagent,99MoO
4
2–
, in nitric acid medium and then extracted into isobutyl acetate. By plotting the phosphorus content against the radioactivity of99Mo in the organic phase, a linear relationship persisting down to 5 ng is obtained. Special effort has been made to the elimination of the unreacted99MoO
4
2–
reagent and the optimal control of phosphorus blank introduced through the multistage analytical procedure in order to ensure reliable determination of phosphorus at the ppb level. |
| |
Keywords: | |
本文献已被 SpringerLink 等数据库收录! |
|