硅微机械谐振器特性与激励光斑位置关系的研究

阐述了对硅悬臂梁谐振子进行光激励研究的结果，结果表明，谐振子的振幅与激励光斑的位置以及所激励的模态有关，在模态的两节点的中心位置进行激励，可得到最大的振幅，而且振幅随着激励光斑偏离子中心位置而下降基节点处激励时，振幅达到最小。上述结论也适用于其它点热源激励的微机械谐振器，并为点热激激励的微机械谐振器的设计和制作提供了依据。

The Relationship Between Silicon Micromechanical Resonators and Excited Point

The optically excited vibrations of silicon cantilever resonators are studied. We give the theoretical results and experimental results of cantilever′s coherent frequency and discuss the effect of excited point on the vibration of the cantilever. The amplitude of output signal is related with the position of optical excited point and the vibration mode. We can get the highest amplitude by selecting the center point of two nodal of the vibration mode, then the amplitude decreases with the optical beam move to the nodal of the mode, where we get the lower signal. This result is satisfied to other micromechanical resonators with point heating excitation.