| Abstract: | Investigations of Light Scattering from Transparent Single Layers on Glass Substrates In the present paper the influence of stochastic interface roughness as well as film thickness on light scattering from dielectric single layers is investigated. By calculations carried out on base of Elson's vector scattering theory especially the importance of correlation functions of microroughness is analyzed. Measurements made from sputtered TiO2-films show dominating interface scattering and an interference phenomenon, depending on film thickness. |
