Elemental depth profiling with a wire in microbeam X‐ray fluorescence analysis |
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Authors: | Atsuo Iida |
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Institution: | Photon Factory, Institute of Materials Structure Science, High Energy Accelerator Research Organization, O‐ho, Tsukuba, Ibaraki 305‐0801, Japan |
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Abstract: | This study proposes simple techniques involving the use of a thin wire set close to the sample surface to measure the elemental depth distribution in microbeam X‐ray fluorescence analysis. One is the X‐ray fluorescence detection in energy‐dispersive mode using a solid‐state detector in combination with the sample movement, and the other is in projection mode using an X‐ray charge‐coupled device camera. The minimum depth resolution (spatial resolution) obtained with a thin Mo wire is about 15 µm. Compared with a confocal depth‐profiling method, wire depth‐profile analysis is easy to implement, flexible, and has reasonable sensitivity. Copyright © 2011 John Wiley & Sons, Ltd. |
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