Design and scaling of nano-electro-mechanical non-volatile memory (NEMory) cells |
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Authors: | Woo Young Choi |
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Institution: | aDepartment of Electronic Engineering, Sogang University, 1 Shinsu-dong, Mapo-gu, Seoul 121-742, Republic of Korea |
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Abstract: | Design and scaling of the NEMory cell have been discussed. Based on analytical simulation using a simple parallel-plate approximation, scaling guideline is derived in terms of pull-in, release voltage, pull-in time and release time. It has been proved that beam length is the most dominant factor which increases operating voltage with scaling-down. Beam and air gap thickness also need to be scaled down in order to lower operating voltage while improving operating speed. |
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Keywords: | Nano-electro-mechanical non-volatile memory (NEMory) Design guideline Scalability Analytical analysis Finite element analysis |
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