Investigation of diffraction gratings with the use of a differential heterodyne microscope |
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Authors: | I M Akhmedzhanov D V Baranov E M Zolotov |
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Institution: | (1) General Physics Institute, Russian Academy of Sciences, Moscow, 119991, Russia |
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Abstract: | A theory of image formation in a scanning differential heterodyne microscope is developed using the results of observations of a metallized periodic structure with a rectangular profile. The phase and amplitude response functions are calculated for TE and TM polarizations. It is demonstrated that the width of grating elements can be measured with a superresolution. The experimental phase and amplitude responses from a metallized grating with a trapezoidal profile are obtained and compared with the results of theoretical calculations. |
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