Investigation of diffraction gratings with the use of a differential heterodyne microscope

A theory of image formation in a scanning differential heterodyne microscope is developed using the results of observations of a metallized periodic structure with a rectangular profile. The phase and amplitude response functions are calculated for TE and TM polarizations. It is demonstrated that the width of grating elements can be measured with a superresolution. The experimental phase and amplitude responses from a metallized grating with a trapezoidal profile are obtained and compared with the results of theoretical calculations.