Solid-State Thin-Film Sensors Based on Chalcogenide Materials Obtained by Planar Technology and Pulsed Laser Deposition |
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| Authors: | Vlasov Yu G Murzina Yu G Legin A V Ermolenko Yu E Schubert J Schüoning M J Lut H |
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| Institution: | (1) St. Petersburg State University, St. Petersburg, Russia;(2) Research Center, Jülich, Germany;(3) University of Applied Sciences of Aachen, Jülich, Germany |
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| Abstract: | Methods of silicon planar technology and pulsed laser deposition were applied to fabricate fully solid-state chemical sensors for determining ions of copper, lead, cadmium, thallium, and also sulfide and chloride ions on the basis of thin chalcogenide films as ion-sensitive membranes. |
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