| 双频激光在超精孔径测量中的应用 |
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| 引用本文： | 赵辉,浦昭邦,刘国栋,韩德东. 双频激光在超精孔径测量中的应用[J]. 光学技术, 2000, 26(5): 435-436 |
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| 作者姓名： | 赵辉 浦昭邦 刘国栋 韩德东 |
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| 作者单位： | 哈尔滨工业大学,自动化测试及控制系,哈尔滨,150001 |
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| 摘 要： | 一种以激光波长为基准的小孔孔径超精测量系统 ,采用双频激光干涉技术、温度误差实时修正技术和符合阿贝原则的合理布局 ,在 8mm～ 5 0mm的范围内实现 0 .0 1μm的分辨力和 0 .1μm的测量精度。该方法已成功应用在惯性仪表零件孔径及垂直度的超精测量中。
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| 关 键 词： | 孔径 双频激光 测量 |
| 修稿时间： | 2000-03-20 |
The application of double-frequency laser on the ultra-precision measuring system of diameter of aperture |
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| ZHAO Hui,PU Zhao-bang,LIU Guo-dong,HAN De-dong. The application of double-frequency laser on the ultra-precision measuring system of diameter of aperture[J]. Optical Technique, 2000, 26(5): 435-436 |
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| Authors: | ZHAO Hui PU Zhao-bang LIU Guo-dong HAN De-dong |
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| Abstract: | A ultra precison measuring system for diameter of aperture based laser wave length was presented. The resolution over 0.01(m and the accuracy over over 0.1μm was obtained in the range 8mm 50mm by means of double frequency laser interference technique. |
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| Keywords: | diameter aperture double frequency laser measurement |
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