| 微流体系统中微阀的研究现状 |
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| 引用本文： | 肖丽君,陈翔,汪鹏,李以贵,陈迪.微流体系统中微阀的研究现状[J].微纳电子技术,2009,46(2). |
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| 作者姓名： | 肖丽君 陈翔 汪鹏 李以贵 陈迪 |
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| 作者单位： | 上海交通大学微纳科学技术研究院,上海,200240;上海交通大学微米/纳米加工技术国家级重点实验室,上海,200240;上海交通大学薄膜与微细技术教育部重点实验室,上海,200240 |
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| 基金项目： | 国家高技术研究发展计划(863计划)，微米/纳米加工技术国家级重点实验室基金 |
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| 摘 要： | 依据微流体系统中微阀的驱动机理,将微阀分为有源微阀和无源微阀两大类,然后对这两大类进行细分,将有源微阀分为压电、磁、静电驱动、热驱动、相变、双稳态、外部驱动等类型,将无源微阀分为悬臂梁式、薄膜式、毛细管、扭矩驱动等类型。分别讨论了各种微阀的工作原理和性能,介绍了各类微阀的实验研究进展,指出了这些微阀的特点,突出了微阀作为微流体系统的主要元件之一,起到径流调节、开/关转换、密封生物分子和微/纳粒子等作用。回顾了微阀的发展历程,分析了目前研究过程中存在的问题,提出了微阀今后的研究方向。
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| 关 键 词： | 微流体系统 有源微阀 无源微阀 常闭型微阀 常开型微阀 |
Research Status of Microvalves in Microfluidic Systems |
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| Xiao Lijun,Chen Xiang,Wang Peng,Li Yigui,Chen Di.Research Status of Microvalves in Microfluidic Systems[J].Micronanoelectronic Technology,2009,46(2). |
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| Authors: | Xiao Lijun Chen Xiang Wang Peng Li Yigui Chen Di |
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| Institution: | a.Institute of Micro and Nano Science and Technology;b.National Key Laboratory of Nano/Micro Fabrication Technology;c.Key Laboratory for Thin Film and Microfabrication of Minstry of Education;Shanghai Jiaotong University;Shanghai 200240;China |
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| Abstract: | Microvalves are divided into active microvalves and passive microvalves according to driving mechanisms of microvalves in microfluidic systems.The active valves are further classified as piezoelectric microvalves,magnetic microvalves,electrostatic microvalves,thermally actuated microvalves,phase change microvalves,bistable microvalves and microvalves using external systems.The passive microvalves are classified as cantilever beam microvalves,membrane microvalves,capillary microvalves,torque-actuated microva... |
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| Keywords: | microfluidic system active microvalves passive mircovalves normally closed microvalves normally open microvalves |
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