Pulse laser deposition of vanadium dioxide films

Thin amorphous and crystalline films of VO₂ are obtained on (0001) sapphire substrates via pulsed laser deposition with the speed separation of particles under a variety of deposition conditions. The electrical and optical properties of the films in the vicinity of the phase transition in the temperature range of 20 to 100°C are studied. The temperature of transition (T_c) and the width of the hysteresis are found to be 67.5 and 3°C, respectively.