DSC of as-deposited thin films dip-coated on the substrate |
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Authors: | Y. Sawada K. Omika Y. Ito F. Muta M. Momota |
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Affiliation: | (1) Tokyo Institute of Polytechnics, 1583 Hyama, Atsugi-Shi, 243-02 Kanagawa;(2) Rigaku Co., 3-9-12 Matsubara-Cho, Akishima-Shi, 196 Tokyo, Japan |
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Abstract: | The formation process of a ceramic (indium oxide) thin film (thickness: approximately 20 nm to several microns) was investigated by thermal analyses. Thermal changes of an organic precursor, indium(III) 2-ethylhexanoate, dip-coated on a glass substrate was successfully detected by DSC in air. Exothermic phenomena were observed at marked lower temperatures for the thin films than for the bulk material; thinner films had slightly lower peak temperatures. The reaction mechanism is discussed with reference to mass spectra of the evolved gases. |
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Keywords: | dip-coating indium oxide thin films |
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