| 基片光学特性对薄膜光强透过谱的影响 |
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| 引用本文： | 余云鹏,林舜辉,黄翀,林璇英. 基片光学特性对薄膜光强透过谱的影响[J]. 物理实验, 2004, 24(5): 37-39,41 |
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| 作者姓名： | 余云鹏 林舜辉 黄翀 林璇英 |
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| 作者单位： | 汕头大学,物理系,广东,汕头,515063 |
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| 摘 要： | 在考虑基片与空气界面反射率以及基片吸收不能忽略的情况下，对常见的基片上薄膜的光强透过率公式进行了修正，导出了该情况下的透过率公式．以非晶硅薄膜为研究对象，采用模拟计算说明基片光学特性对薄膜光强透过谱的影响．
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| 关 键 词： | 薄膜 光强透过谱 基底 反射率 非晶硅薄膜 |
| 文章编号： | 1005-4642(2004)05-0037-03 |
Effect of optical characteristics of substrate on optical transmission spectra of film |
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| YU Yun peng,LIN Shun hui,HUANG Chong,LIN Xuan ying. Effect of optical characteristics of substrate on optical transmission spectra of film[J]. Physics Experimentation, 2004, 24(5): 37-39,41 |
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| Authors: | YU Yun peng LIN Shun hui HUANG Chong LIN Xuan ying |
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| Abstract: | Taking account of the reflectivity on air/substrate interface and the absorption in substrate, the common used formula to calculate optical transmission is calibrated. Taking a Si:H film as an example, the effect of above factors on spectra is investigated from simulated results. |
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| Keywords: | film transmission spectrum substrate |
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