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Direct fabrication of micro mesas by VUV laser ablation of polymers: PMMA (polymethylmethacrylate) |
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| Authors: | M. Lapczyna M. Stuke |
| Affiliation: | Max-Planck-Institut für biophysikalische Chemie, P.O. Box 2841, D-37018 G?ttingen, Germany, DE |
| Abstract: | Received: 19 December 1997 |
| Keywords: | PACS: 81.15 Fg 85.42.+m 87 47 |
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