| 高反膜镀制工艺研究的新进展 |
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| 引用本文： | 邓婷,黄光周,刘雄英,朱建明,戴晋福.高反膜镀制工艺研究的新进展[J].真空电子技术,2009(3):30-36. |
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| 作者姓名： | 邓婷 黄光周 刘雄英 朱建明 戴晋福 |
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| 作者单位： | 1. 华南理工大学电子与信息学院,广东,广州,510640
2. 广东肇庆市科润真空设备有限公司,广东,肇庆,526060 |
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| 摘 要： | 叙述了近几年国内外的研究进展，包括高反膜几种不同的制备工艺，如电子柬蒸发沉积、离子束辅助沉积、离子束溅射沉积和溶胶-凝胶沉积法等，分析了各种制备方法及工艺的特点；针对高反膜的抗激光损伤阈值低从而影响激光器输出功率的问题，讨论了提高损伤阈值的途径；最后归纳了各种制备工艺的优缺点，并探讨了进一步提高薄膜反射率的可能性。
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| 关 键 词： | 高反膜 反射率 制备工艺 损伤阈值 |
New Progress of Fabrication Technologies for High Reflectance Coating in Laser's Resonant Cavity |
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| DENG Ting,HUANG Guang-zhou,LIU Xiong-ying,ZHU Jian-ming,DAI Jin-fu.New Progress of Fabrication Technologies for High Reflectance Coating in Laser''s Resonant Cavity[J].Vacuum Electronics,2009(3):30-36. |
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| Authors: | DENG Ting HUANG Guang-zhou LIU Xiong-ying ZHU Jian-ming DAI Jin-fu |
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| Institution: | DENG Ting , HUANG Guang-zhou , LIU Xiong-ying , ZHU Jian-ming , DAI Jin-fu (1. College of Electronic and Information Engineering, South China University of Technology , Guangzhou 510640, China; 2. Zhaoqing Kerun Vacuum Equipment Co. Ltd. of Guangdong, Zhaoqing 526060, China) |
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| Abstract: | The recent research advances of domestic and foreign countries are reviewed. It has narrated several kinds of fabrication technologies for laser high reflectance coating, such as electron beam evaporation, ion-beam-assisted deposition, ion beam sputtering deposition, sol-gel sedimentation, and so on. It also has analyzed the characteristics of each method. For the low value of anti-laser damage threshold may lead to the low output of laser, the approach to increase the value has been discussed. Finally, the advantages and disadvantages of each technology have been summarized, and the probabilities of further increasing the reflectance of thin film have been discussed. |
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| Keywords: | High reflectance coating The index of reflection Craft of manufacture Damage threshold value |
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