亚微米级叉指型超微带电极阵列的加工和电化学表征

超微电极具有常规电极无法比拟的优良的电化学特性.超微电极包括单超微电极和超微电极阵列,单超微电极响应电流较小,一般仪器难以检测;而超微电极阵列除具有单超微电极的特点外,还能增加测量时的响应电流,有利于仪器检测.其中的叉指型超微带电极阵列(IDA)具有产生-收集效应,可提高检测的灵敏度,实现低浓度测量1～4].将微电子技术和微细加工技术应用于化学和生物传感技术已引起关注,利用微细加工技术可以实现传感器的微型化、集成化和智能化;减少测量使用的样品量;使传感器的敏感元件具有确定的形状和尺寸,提高测量结果的一致性.本文用多…

Fabrication and Electrochemical Characterization of Submicrometer Interdigitated Ultramicroelectrode Arrays

A gold submicrometer interdigitated ultramicroelectrode array(IDA) was fabricated by conventional photolithographic patterning of multilayered materials. The IDA structure, which consists of 50 pairs of fingers and has 1.5 mm finger length and 362 nm functional band width, is fabricated in a small region(1.5 mm×2.3 mm) on a quartz substrate. The electrode surfaces are inside the (trenches). Gold film thickness is the electrode width that is exactly measured by atomic force microscopy(AFM). The surface topographies of gold film and substrate are characterized by AFM for the study of the variation of electrode width. Scanning electron microscopy(SEM) is used to visualize the quality of fabrication and to measure the fingers. Electrochemical properties of IDA electrodes are investigated by cyclic voltammetry through three-electrode system. It is shown that IDA electrodes can be used as the disposable ultramicroelectrodes of chemical and biologic sensors.