Tunable bulk acoustic wave resonators with the induced piezoelectric effect in a ferroelectric

An electromechanical model of the piezoelectric effect induced in an acoustic resonator based on a ferroelectric film under the action of a dc or weak ac voltage is developed. The basic equation is obtained by expansion of the free energy in a series with respect to the electric induction and the mechanical deformation. The system of electromechanical equations for variable components of the induction and the mechanical deformation involves all linear terms along with the component of the electrostriction nonlinear with respect to the mechanical deformation. These electromechanical equations made it possible to obtain a one-dimensional approximation for the effective parameters of the material: the piezoelectric modulus and the elastic modulus as a function of the strength of the electric field applied to the acoustic layer. Expressions for the controlled electromechanical coupling coefficient and resonance frequencies of the tunable acoustic resonator are found. It is shown that the most significant parameter responsible for the tuning is the nonlinear electros-triction coefficient M, whose magnitude and sign were evaluated from the available experimental data.