Morphology dependence of the dielectric properties of epitaxial BaTiO3 films and epitaxial BaTiO3/SrTiO3 multilayers

Epitaxial BaTiO₃ films and epitaxial BaTiO₃/SrTiO₃ multilayers were grown by pulsed laser deposition on vicinal surfaces of (001)-oriented Nb-doped SrTiO₃ (SrTiO₃:Nb) single-crystal substrates. Atomic force microscopy was used to investigate the surface topography of the deposited films. The morphology of the films, of the BaTiO₃/SrTiO₃ interfaces, and of the column boundaries was investigated by cross-sectional high-resolution transmission electron microscopy. Measurements of the dielectric properties were performed by comparing BaTiO₃ films and BaTiO₃/SrTiO₃ multilayers of different numbers of individual layers, but equal overall thickness. The dielectric loss saturates for a thickness above 300 nm and linearly decreases with decreasing film thickness below a thickness of 75 nm. At the same thickness of 75 nm, the thickness dependence of the dielectric constant also exhibits a change in the linear slope both for BaTiO₃ films and BaTiO₃/SrTiO₃ multilayers. This behaviour is explained by the change observed in the grain morphology at a thickness of 75 nm. For the thickness dependence of the dielectric constant, two phenomenological models are considered, viz. a series-capacitor model and a dead-layer model. PACS 77.22.-d; 77.22.Ch; 77.55.+f; 77.22.Gm; 77.84.Dy; 81.15.-z ; 81.16.Mk; 81.65.-b; 68.55.-a; 68.37.-d