ZnO sensing structure for $mbox{sffamilybfseries NH}_{hbox{sffamilybfseriesfontsize{12}{12}selectfont 3}}$ detection |
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| Authors: | A. Piotrowska E. Papis E. Kamińska K. Gołaszewska T. Pustelny E. Maciak Z. Opilski |
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| Affiliation: | (1) Institute of Electron Technology, Warsaw, Poland;(2) Department of Optoelectronics at Faculty of Mathematics and Physics Silesian University of Technology, Gliwice, Poland |
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| Abstract: | Layered structure for the detection and measuring of gaseous ammonia have been presented. The presented sensor structures hale Bern developed on the base of thin ZnO and Au/Cr layers deposited on a glass substrate. The technological as well as optical properties of the elaborated sensing structures have been discussed. |
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