A compact optical heterodyne interferometer by optical integration and its application |
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Authors: | Koichiro Miyagi Masaya Nanami Isao Kobayashi Akira Taniguchi |
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Institution: | (1) Research Laboratory, ANRITSU Corporation, 1800, Onna, 243 Atsugi, Kanagawa, Japan |
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Abstract: | A compact high-resolution optical heterodyne interferometer combining a two-frequency light module and a minute optical system
is described. The light module, which generates two independent frequencies of light, is fabricated by proton exchange method
on LiNbO3 substrate. We report an experiment evaluating measurement accuracy using a micro-displacement measurement system which incorporates
this interferometer. Results of the experiment with a standard thickness sample show high thermal stability with maximum measurement
error of 1.8 nm at a temperature from 19°C to 33°C. The system was used to measure the hysteresis of a piezoelectric element
for displacements of several nm, thereby making it possible to analyze the system quantitatively in practice. |
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Keywords: | heterodyne interferometer optical frequency shifter SAW proton exchange |
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