SIMS investigations of titanium profiles in LiNbO3 produced by ion beam mixing and diffusion |
| |
| Authors: | T. Bremer D. Kollewe H. Koschmieder W. Heiland |
| |
| Affiliation: | (1) Fachbereich Physik der Universität, Barbarastrasse 7, D-4500 Osnabrück, Federal Republic of Germany;(2) Institut für Strahlenphysik, Universität Stuttgart, Allmandring 3, D-7000 Stuttgart, Federal Republic of Germany |
| |
| Abstract: | Summary In order to increase the refractive indices of LiNbO3 just beneath the surface, i.e. to produce waveguides, titanium was incorporated into y-cut substrates by two different methods: Evaporated Ti layers were either diffused at 1000°C or mixed into the substrate with a 3 MeV Ti+ beam. Radiation damage caused by ion beam mixing was removed by epitaxial regrowth. The resulting Ti concentration profiles were investigated by means of secondary ion mass spectrometry. The diffused profiles could be fitted by half Gaussians with a diffusion constant ofD = 5.25 × 10–17 m2/s at 1000°C. The ion beam mixed and annealed profiles show a non-zero slope at the surface and differ significantly from Gaussians.
SIMS-Untersuchung von Titanprofilen in LiNbO3 hergestellt durch Ionenstrahl-Mischung und Diffusion |
| |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ |
|
