| BC2N薄膜的柱状生长及生长机理 |
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| 引用本文： | 马锡英,贺德衍,陈光华.BC2N薄膜的柱状生长及生长机理[J].物理学报,2001,50(10):2023-2027. |
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| 作者姓名： | 马锡英 贺德衍 陈光华 |
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| 作者单位： | (1)北京工业大学应用物理系,北京100022; (2)兰州大学物理科学与技术学院,兰州730000 |
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| 基金项目： | 兰州大学博士启动基金(批准号:870883) |
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| 摘 要： | 应用热丝辅助等离子体化学气相沉积法(CVD)合成了表面呈柱状的BC2N薄膜,X射线、红外及X射线电子能谱分析表明,薄膜的化学组分主要为BC2N,B,C和N原子间互相结合成键.扫描电镜观察到,薄膜表面形貌呈排列整齐、取向一致的柱体,并且发现这种生长方式与沉积参数密切相关.最后从结合能方面讨论了柱状BC2N的生长机理.
关键词：
2N')" href="#">BC2N
柱状生长
CVD法
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| 关 键 词： | BC2N 柱状生长 CVD法 |
| 收稿时间： | 2000-11-17 |
| 修稿时间： | 2000年11月17 |
SYNTHESIS AND MECHANISM OF BC2N THIN FILMS IN STALK-LIKE GROWTH |
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| MA XI-YING,HE DE-YAN and CHEN GUANG-HUA.SYNTHESIS AND MECHANISM OF BC2N THIN FILMS IN STALK-LIKE GROWTH[J].Acta Physica Sinica,2001,50(10):2023-2027. |
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| Authors: | MA XI-YING HE DE-YAN and CHEN GUANG-HUA |
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| Abstract: | The BC2N thin films in stalklike growth have been deposited by hot filament assisted and rf plasma chemical vapor deposition (CVD). It was shown that the composition of the thin films mainly consists of BC2N, in which B, C and N were combined in atomic bonds. And the surface of the film took the shape of stalks, they were in regular arrangemeut with a uniform orientation observed with scanning electron microscopy.-In addition, we found this kind of growth had intimate relation with the deposition parameters. Finally, we analyzed the growth machanism of the stalklike BC2N. |
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| Keywords: | BC2N CVD |
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