CO选择性厚膜气敏元件及其特性 |
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引用本文: | 卢革宇,孙良彦,吕德安,吴家琨,刘正绣,韩敬,魏秀红,邱要武. CO选择性厚膜气敏元件及其特性[J]. 吉林大学学报(理学版), 1992, 0(2) |
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作者姓名: | 卢革宇 孙良彦 吕德安 吴家琨 刘正绣 韩敬 魏秀红 邱要武 |
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作者单位: | 吉林大学电子科学与技术研究所 长春(卢革宇,孙良彦,吕德安,吴家琨,刘正绣,韩敬,魏秀红),吉林大学电子科学与技术研究所 长春(邱要武) |
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摘 要: | 本文采用丝网印刷技术制作了CO选择性厚膜气敏元件,并对其加热器特性及气敏特性进行了研究。结果表明,元件的电参数具有较好的一致性;在低温下对CO具有较高的灵敏度和选择性。加热器在CO的工作温度下具有一定的稳定性。
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关 键 词: | 气敏元件 厚膜 一氧化碳 |
Research on Selective Thick Film CO Gas Sensors and Their Characters |
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Abstract: | Selective thick film CO gas sensors were made. The characters of gas sensitivity and thick film heater were investigated. A better identity of the sensors was obtained by controlling suitable conditions. At low temperatures, high sensitivity and selectivity were obtained by adding proper dopants. The thick film heater has a better stability by using a protecting layer. |
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Keywords: | gas sensor thick film carbon oxide |
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