| Abstract: | Fluorocarbon polymer films were prepared by plasma polymerization using nitrogen trifluoride (NF3) and propylene as starting materials. To improve their adhesiveness to substrates, a novel functionally gradient film in which the content of fluorine decreased continuously from the surface to the interior was prepared by changing source gas composition during deposition. This film had a smooth and pinhole-free surface, and had a high contact angle (110°) for water drop. In addition, it showed good adhesion to a glass substrate. © 1996 John Wiley & Sons, Inc. |
