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Fabrication and measurement of traceable pitch standard with a big area at trans-scale |
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| Authors: | Deng Xiao Li Tong-Bao Lei Li-Hua Ma Yan Ma Rui Weng Jun-Jing Li Yuan |
| Abstract: | |
| Keywords: | atom lithography nano-scale metrology standard traceability |
| 本文献已被 CNKI 等数据库收录！ | |