Analysis of cluster ion sputtering yields: correlation with the thermal spike model and implications for static secondary ion mass spectrometry期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Analysis of cluster ion sputtering yields: correlation with the thermal spike model and implications for static secondary ion mass spectrometry

Authors:	M. P. Seah

Affiliation:	Quality of Life Division, National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom, UKQuality of Life Division, National Physical Laboratory, Teddington, Middlesex TW11 0LW, United Kingdom, UK.

Abstract:

Keywords:	cluster sputtering ion yields sputtering yields static SIMS thermal spike