Experimental and theoretical determination of the mixing efficiency at low‐energy Ar+ bombardment: case study of the Cu/Co system |
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| Authors: | M Menyhard P Süle |
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| Institution: | 1. Research Institute for Technical Physics and Materials Science, Budapest H‐1525, PO Box HungaryResearch Institute for Technical Physics and Materials Science, Budapest H‐1525 PO Box 49, Hungary.;2. Research Institute for Technical Physics and Materials Science, Budapest H‐1525, PO Box Hungary |
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| Abstract: | The mixing of a Co/Cu bilayer induced by low‐energy ion bombardment was studied by AES depth profiling and molecular dynamic (MD) simulation. The conditions of the ion bombardment were as follows: Ar+ ion, 1 keV energy, 82° angle of incidence (with respect to the surface normal). In AES depth profiling, the in‐depth concentration distribution was estimated from the measured Auger intensities assuming that the in‐depth distribution is an erf function. The variance (σ2) of the erf function gave the broadening of the interface due to ion bombardment, which divided by the fluence (Φ) and deposited energy (FD given by SRIM) gave the mixing efficiency (σ2/ΦFD) to be 0.08 ± 0.01 nm5/keV. The mixing efficiency calculated by MD, 0.09 nm5/keV, agreed well with that estimated from the experimental data, and both have been close to the value assuming ballistic mixing. Copyright © 2007 John Wiley & Sons, Ltd. |
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| Keywords: | AES depth profiling MD simulation ion beam mixing ballistic mixing |
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