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Cluster ion sputtering: molecular ion yield relationships for different cluster primary ions in static SIMS of organic materials |
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| Authors: | M. P. Seah |
| Affiliation: | Quality of Life Division, National Physical Laboratory, Teddington, Middlesex TW11 0LW, UKQuality of Life Division, National Physical Laboratory, Teddington, Middlesex TW11 0LW, UK. |
| Abstract: | |
| Keywords: | cluster sputtering damage cross‐section disappearance cross‐section efficiency molecular ion yields sputtering yields static SIMS thermal spike |