高频电场对双探针法诊断低压等离子体的影响

本文中导出了不论在鞘层上是否存在高频电压降时统一的双探针伏-安特性曲线表达式及确定电子温度的公式。从理论及实验上研究了鞘层上的交流电压对双探针诊断的影响,并求得等离子体在10^-2—10^-3Torr范围内的电子温度,实验的分析结果和理论完全一致。证明当电子能量分布为麦克斯韦分布时,高频干扰对确定电子温度基本上无影响。通过对实验结果的分析,以及用三探针法的相互校核,证明实验结果是可靠的。关键词：

INFLUENCE OF THE HIGH FREQUENCY ELECTRIC FIELD ON THE PLASMA DIAGNOSTICS BY THE DOUBLE PROBE

In this paper, the expression for the double probe V-l characteristics and a formula to determine the electron temperature are derived. They are applicable whether the R. F. disturbance voltage drop across the probe sheath exists or not. The influence of this R. F. disturbance voltage on the double probe diagnostics for a low pressure plasma is investigated. Furthermore, the electron temperatures of the R. F. plasma under the pressure of 10^-2—10^-3 Torr are obtained experimentally. Experimental results agree with the theoretical analysis very well, k is also demonstrated that, if the electron energy distribution is Maxwillian, the R. F. disturbance has no substantial effect on the determination of electron temperatures of the plasma.