Alteration of Structure and Properties of Thin Polyimide Films and Coatings by Plasma and Thermal Treatment

The influence of alternating radiofrequency-plasma and heat treatment on the structure and bulk properties of polyimide films and coatings with a thickness of 3.5 m was studied. It was shown that plasma treatment leads to the enhancement of the specific surface energy due to the polar component and to an increase in the diffusion coefficient and in the amount of sorbed water. The subsequent thermal treatment leads to the recovery of the polyimide surface and bulk properties to almost their initial magnitudes. It was assumed that these effects are caused by a change in the structure of thin films and coatings and by the buildup of negatively charged particles at the surface and in mesopores of the polymer upon RF plasma treatment and due to annealing upon thermal treatment.