A thermally stable 2D array of spheres and their morphology control become important for the fabrication of novel nanostructures. Here, a simple method is presented for fabrication of large‐area and well‐ordered arrays of carbonized polystyrene (PS) hollow spheres with a controlled (close‐packed or non‐close‐packed hexagonal) morphology, prepared by combining the self‐assembly of PS‐grafted silica nanoparticles, etching, electron irradiation, and subsequent thermal annealing. Fine control in the 2D or 3D nanostructure of carbon materials can open up new opportunities for high‐performance nanoscale applications that require an efficient fabrication method for preparation of the porous carbon array.
