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Initial oxidation process of Mg films characterized by AES,EELS, and UPS
Institution:1. Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Peter Grünberg Institute, Forschungszentrum Jülich, Jülich 52425, Germany;2. School of Physics and Astronomy, Monash University, Clayton, Victoria 3800, Australia;3. School of Physics, University of Melbourne, Parkville, Victoria 3010, Australia;1. HREM Research Inc., 14-48 Matsukazedai, Higashimatsuyama, Japan;2. National Institute for Materials Science (NIMS), 1-2-1 Sengen, Tsukuba, Japan
Abstract:Initial oxidation process of Mg films was investigated by Auger electron spectroscopy (AES), electron energy loss spectroscopy (EELS) and ultraviolet photoelectron spectroscopy (UPS). A polycrystalline Mg film was exposed to oxygen at room temperature. An inspection of EELS reveals that the initial oxidation process could be classified according to the curve profile in the low energy loss region. The oxide formation is initiated after oxygen exposure of 3 L (Langmuir).
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