Electron emission characteristics of the porous polycrystalline silicon diode |
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| Affiliation: | 1. Display and Nano-Devices Laboratory (L6320), Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul 130-650, South Korea;2. Electronics and Telecommunications Research Institute, 161Gajeong-dong, Yuseong-gu, Daejeon 305-350, South Korea;3. Department of Physics, Kyung-Hee University, Seoul 130-701, South Korea;1. Department of Biochemistry Food Science, Saga University, Saga City, Saga, 840-8502, Japan;2. Faculty of Agriculture, Saga University, Saga City, Saga, 840-8502, Japan;3. Itochu Sugar Co. Ltd 3 Tamatsuura, Hekinan City, Aichi, 447-8502, Japan;4. Saga University Organization for General Education, Saga City, Saga, 840-8502, Japan;1. Department of Neurology, The Second Affiliated Hospital of Nanchang University, Nanchang, China;2. Department of Neurology, The First Affiliated Hospital of Nanchang University, Nanchang, China;1. State Key Joint Laboratory of Environment Simulation and Pollution Control (SKLESPC), School of Environment, Tsinghua University, Beijing 100084, China;2. Ministry of Education Key Laboratory for Earth System Modelling, Department of Earth System Science, Tsinghua University, Beijing 100084, China;3. State Key Joint Laboratory of Environment Simulation and Pollution Control (SKLESPC), School of Environment, Beijing Normal University, Beijing 100875, China;1. Department of Oncology-Pathology, Visionsgatan 4, Karolinska Institutet, S-17164, Stockholm, Sweden;2. Department of Physiology and Pharmacology, Solnavägen 9, Karolinska Institutet, S-17165, Stockholm, Sweden;3. Theme Cancer, Karolinska University Hospital, S-17176, Stockholm, Sweden;1. Department of Molecular Pathobiology and Cell Adhesion Biology, Mie University Graduate School of Medicine, 2-174 Edobashi, Tsu-city, Mie, 514-8507, Japan;2. Department of Emergency and Disaster Medicine, Mie University Graduate School of Medicine, 2-174 Edobashi, Tsu-city, Mie, 514-8507, Japan;3. Department of Clinical Nutrition, Faculty of Health Science, Suzuka University of Medical Science, 1001-1 Kishioka, Suzuka-city, Mie, 510-0293, Japan;4. Department of Pharmacology, Faculty of Medicine, Shimane University, 89-1 Enya-cho, Izumo-city, Shimane, 693-8501, Japan |
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| Abstract: | It is estimated that a porous polysilicon (PPS) diode with a structure of Au/PPS/n-type Si operates as an efficient stable surface emitting cold cathode. 2.0 μm of an non-doped polysilicon layer is formed on an heavily doped n-type silicon wafer and anodized in a solution of HF (50%):ethanol=1:1 under illumination by a 500 W tungsten lamp from a distance of 20 cm. The electron emission properties of the PPS diode were investigated as a function of anodizing condition such as anodizing current density. The electron emission trajectory was investigated, and it was also demonstrated their good uniformity in the emitting area. |
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